Nanospring pressure sensors grown by glancing angle deposition.

Designing Nanostructures by Glancing Angle Deposition

Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nanorod arrays with different shapes, nanospring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional cap...

Morphology control of tungsten nanorods grown by glancing angle RF magnetron sputtering under variable argon pressure and flow rate

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au a...

Self-assembled broadband plasmonic nanoparticle arrays for sensing applications

Highly ordered noble metal nanoparticle (NP) arrays are produced using a glancing angle deposition on stepped substrates. The versatility of the technique is demonstrated by depositing different metals, resulting in shifts of the resonance positions. The behaviour of the NP arrays grown is predicted by a dipolar model, and it is measured using reflectance anisotropy spectroscopy (RAS). Fine tun...

Two-component nanopillar arrays grown by Glancing Angle Deposition

Periodic arrays of 160to 500-nm-wide Si and Cr nanostructures were grown on patterned Si(001) substrates by Glancing Angle Deposition (GLAD). Initial patterning was achieved by colloidal self-assembly of 500-nm-diameter polystyrene and 160-nm-diameter silica microspheres which form, during drying from suspension, close-packed hexagonal arrays. Si deposition onto a monolayer of 500-nmdiameter sp...